Lithography soft bake heating element
Why a Soft Bake Needs a Heater Built for the Job We make heating elements for lithography soft bake, specifically for the front end of wafer...
Uniformity photoresist bake lamp
On the lithography floor, the soft bake and hard bake are where the photoresist profile gets made or broken. If the bake isn’t uniform across...
Deep UV (DUV) resist bake lamp
On the lithography floor, you know the drill: a bake that drifts even half a degree throws CD control off spec. You run DUV photoresist through soft...